Nano-particle analysis poster 2014 update 1 (1) FINAL
Published on: Mar 3, 2016
Transcripts - Nano-particle analysis poster 2014 update 1 (1) FINAL
Innovative Particle-Monitoring Technologies
Nano-particle analysis using
dark laser beam sensor
In the Semicon industry with patterns down to the 10 nm
range, nano-particles contamination affects yield. The
detection of these particles down to 20 nm and below is
critical for the process.
dark laser beam which contains a dark line where the light
intensity is zero. This structured dark laser beam allows us to
mitigate the diffraction limit imposed by the wavelength of the
illuminating light, which makes it impossible to detect single
particles smaller than this wavelength.
A nano-particle analyzer extending into the deep
nanometer region is presented
The “Individual Particle - Sensing Approach” (IPSA™)
Tel: +1-780-378-2862 Cell: +1-780-680-2930 e-mail: firstname.lastname@example.org website: www.anms.ca
Meir Teichner & Joseph Shamir
Signal classification for different particles. The numbers
beside the “c” indicates the number of events.
The Patented Technology
Particle classification20 nano -particle detection
Dark beam illumination was found useful for high resolution particle detection and sizing.
Single particle detection is superior to ensemble analysis in terms of resolution and analysis of poly-disperse samples.
The ability of the technology to detect 20 nano particles was demonstrated
Suitable for in-line operation.
Alberta Nano-Monitoring Systems Ltd.